Contract award · 16 Dec 2025

Supply and Commissioning of an Inductively Coupled Plasma Etcher

University of Strathclyde awarded “Supply and Commissioning of an Inductively Coupled Plasma Etcher” to SENTECH Instruments GmbH for £376k on 16 Dec 2025.

Electrical equipment & lightingScotland

Value £376k

Open competition

Open procedure: the contract was advertised and any supplier could submit a bid.

Key facts

Buyer
University of Strathclyde · Body governed by public law
Value
£375,883.47
Procedure
Open procedure
Sector
Electrical equipment & lighting · Microelectronic machinery and apparatus (CPV 31712100)
Region
Scotland
Timeline
  1. Contract date16 Dec 2025
  2. Published8 Jan 2026Published 23 days after the contract date

Description

The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher system The Technical Team envision that the equipment will process semiconductor materials that will include but not be limited to: 1 Gallium Nitride (GaN) light-emitting diodes 2 Silicon (Si) passive and active devices The equipment will be used to advance scientific investigation in neuro-technology and operated by PhD students, Postdoctoral Research Associates and Technicians within the Institute of Photonics. The Contracting Authority anticipates that the contract will be for a duration of twenty (24) months. The Contracting Authority requires a supplier that can fulfil the below non-exhaustive list of requirements: 1 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) mode of operation to plasma etch hard materials such as GaN at etch rate of >500nm/min 2 Deep Silicon Etching (DSE) mode of operation to plasma etch high aspect rat…

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