Contract award · 19 Feb 2026

EBeam Lithographer

University Of Edinburgh awarded “EBeam Lithographer” to JEOL UK Ltd for £2.4m on 19 Feb 2026. Awarded without open competition.

No competitionLaboratory & precision equipmentScotland

Value £2.4m
WinnerJEOL UK Ltd

Awarded without open competition

Awarded without open competition. The buyer went directly to one or a few suppliers instead of advertising the contract. Procurement rules allow this only in specific cases, such as extreme urgency, when only one supplier can do the work, or for call-offs from an existing framework.

What “without competition” means

Key facts

Buyer
University Of Edinburgh · Body governed by public law
Supplier
JEOL UK Ltd
Value
£2,398,869
Procedure
Award procedure without prior publication of a call for competition
Sector
Laboratory & precision equipment · Laboratory, optical and precision equipments (excl. glasses) (CPV 38000000)
Region
Scotland
Timeline
  1. Contract date19 Feb 2026
  2. Published2 Mar 2026Published 11 days after the contract date

Description

The University has a requirement for an Electron Beam lithography system which has an acceleration voltage of at least 200 kV. It must be capable of the following: a) Ultra-fine line lithography: 3 nm linewidth, using commercially available resists. This can be obtained by its single-nm digit beam diameter. b) Ultra-high position accuracy: This can be obtained by a laser interferometer with Å (sub-1 nm) reading resolution, enabling a stitching accuracy of ±8 nm and overlay accuracy of ±8 nm. c) Uniform fine pattern writing over entire field: Uniform nm-scale lines can be drawn from edge to edge across a large field (≥2000μm) without the need for stitching. This guarantees better accuracy, eliminates the need for stage movement, and enhances writing speed and throughput. d) High throughput lithography: This will be enabled by a 125 MHz (or higher) high-speed deflection system coupled with a new electron beam column design. e) Wafer scale (& multi wafer) processing: Single cassette auto…

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